AZO Transparent Conductive Coating Line

AZO Transparent Conductive Coating Line

Http://www.pvd-metallizer.com

Brief introduction:

The horizontal/vertical continuous magnetron sputtering AZO 

Film coating line designed to be composed of 7 chambers, 

I.e. input chamber, fore-buffering transition chamber, fore-

Transmission chamber, Sputtering deposition chamber, post-

Transmission chamber, post buffering transition chamber, 

Output chamber respectively. Two pairs of MF Si twin targets 

Under PUC04 closed loop control to produce high-quality SiO2 

Isolated layer. Equipped with 10 pairs of AZO rotary target 

To realize high-quality AZO transparent conductive film, the 

Machine line designed for substrate glass dimension 1100mm 

In width, 1400mm in length with production cycle optimized 

To 100-180 seconds. Furthermore, with turbo-pump group 

Equipped for effective gas isolation in design, it obtains 

Highly efficient isolation from contamination, stable 

Pumping velocity and uniform distribution of operation gas. 

Technical data and features: 

1), Equipment structure: horizontal or vertical type 

Continuous magnetron sputtering coating line. 

2), Substrate glass dimension: 1100mm×1400mm×3mm;

3), Design required of deposition uniformity: in area of 

Effective deposit, the uniformity of film thickness ±5%;

4), Cathode structure: by use of MF twin rotary cathode with 

Dimension 135mm×1400mm;

5), Driving mode; by use of double friction driving 

Horizontal loader to carry substrate glass panel;

6), Deposition technology: adopting ZnO doped Al ceramic 

Target by reactive sputtering deposition technology;

7), Electric control system: It can realize full 

Communications by operator to machine and necessary 

Intervention to production process with alarm system and 

Error display functions that help operators to run the 

Machine in good order and remove troubles. 

8), Temperature control: Stainless steel armoured heating 

Device equipped is able to realize max. temperature 350 

Degrees centigrade, adjustable within the range from 

Ordinary temperature to 400 degrees centigrade with 

Stability±5 degrees centigrade;  

9), Main technical parameters 

1), Maximum vacuum pressure: 6×10E-4Pa 

2), Average process cycle: 80-180 seconds/frame. 

3), Substrate dimension: 1100×1400(mm) (can be designed as 

Per requirement). 

4), Deposition uniformity: ±5%.

China Guangdong PVD Metallizer Co.

Alex Li

Mobile: +86 13929890858

Skype: vacuum-metallizer

Email: vacuumsale@hotmail.com

598828529@qq.com

Website: http://www.pvd-metallizer.com

Address: No.1 duanzhou road, Zhaoqing, China

Please click below to see videos of our metalizing machines:

Http://www.youtube.com/watch?v=ksrnggJYYVI

Http://www.youtube.com/watch?v=dt4Cu7uWCug

Http://www.youtube.com/watch?v=ux01xRBDbgw

Http://www.youtube.com/watch?v=Of1t1_YYCj8

Http://www.youtube.com/watch?v=YzTisG_A3k0

Http://www.youtube.com/watch?v=MRKtFwEPEiM

Http://www.youtube.com/watch?v=3-K4iuf2snE

Http://www.youtube.com/watch?v=X191aw9GWDI&feature=youtu.be

86-758-2806393

1) Machinery and Equipments►Industrial Machines and Equipments

China ► Guangdong

vacuumsale@hotmail.com

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